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The study of defects observed in substrates with gadolinium gallium garnet (GGG) with orientations (110), (100) and (111) and in epitaxial films grown of iron-yttrium garnet (YIG) were investigation. It is shown that the line width ferromagnetic resonance strongly depends on the presence of defects in YIG films. It was established that the highest quality and minimal magnetic losses have YIG films with a thickness of 2...8 mm grown on GGG defect-free substrates with orientation (111), which were grinding and polishing the surface to 14 grade purity.

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