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The continuous wavelet transform (CWT) method is a useful tool for the determination of refractive index dispersion of dielectric films. Mother wavelet selection is an important factor for the accuracy of the results when using CWT. In this study, generalized Morse wavelet (GMW) was proposed as the mother wavelet because of having two degrees of freedom. The simulation studies, based on error calculations and Cauchy Coefficient comparisons, were presented and also the noisy signal was tested by CWT method with GMW. The experimental validity of this method was checked by D263 T schott glass having 100 μm thickness and the results were compared to those from the catalog value.