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For developing an active workpiece holder, piezo actuators are used to apply compensation forces and displacements. These actuators suffer from hysteresis effects which impair accuracy and performance. The focus of this work is the modelling of the actuator's hysteresis and establishing a corresponding inverse model to compensate the effect in an open-loop approach. The model, on the basis of easy to calculate sigmoid functions, is shown to yield good linearization of the actuator's behavior.

No abstract