The paper is devoted to investigations on nanomechanical behaviors of biochips in label-free biodetections. The chip consists of Si-layer, Ti-layer, Au-layer and single-strand DNA (ssDNA) molecular brush biolayer immobilized by self-assembly technology of thiol group. Unlike previous viewpoints, such as force-bending, entropy-bending and curvature electricity effect, etc., the piezoelectric effect of the biopolymer brush layer is viewed as the main factor that induces nanomechanical bending of biochips, and a classical macroscopic piezoelectric constitutive relation is used to describe the piezoelectric effect. A new laminated cantilever beam model with a piezoelectric biolayer in continuum mechanics, the linearized Poisson-Boltzmann equation in statistical mechanics and the scaling method in polyelectrolyte brush theory are combined to establish a relationship between the nanomechanical deflection of DNA chips and the factors such as nanoscopic structural features of ssDNA molecules, buffer salt concentration, macroscopic mechanical/piezoelectric parameters of DNA chips etc. Curve fitting of experimental data shows that the sign of the piezoelectric constant of the biolayer may control the deflection direction of DNA chips during the packaging process.
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