The surface morphologies and structural phases of CrSi2, MoSi~, and PtSi are investigated using a transmission electron microscope. Epitaxial PtSi and polycrystalline CrSiz and MoSi2 are formed by rapid thermal annealing and conventional thermal annealing, respectively. The complex refractive indices are determined using a polychromatic ellipsometer at wavelengths of 400 to 700 nm.
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