32in full high definition display devices based on back-channel etch IGZO TFTs were prepared. The mechanism of interlayer peeling defect in IGZO TFTs formation was studied. It turns out that the passivation layer was peeling with the underlying source electrode, which caused an interruption in signal transmission. Relevant process improvements were implemented, and the interlayer peeling defect in IGZO TFTs was solved.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.