Two-dimensional transition-metal
chalcogenide has become one of
the most promising materials for miniaturization beyond Moore’s
law due to its atomic-level thickness and excellent semiconductor
properties. The inverter is the most basic logic gate circuit. Using
double-temperature zone chemical vapor deposition and oxygen plasma
doping technique, we obtained n-type and p-type MoS2 materials
and designed an MoS2 CMOS inverter, showing excellent electrical
performance. Under the condition of V
dd = 5 V, the peak voltage gain of the inverter is 7.48, the maximum
static power consumption is 37.7 nW, the noise margin low is 0.45V
dd, the noise margin high is 0.32V
dd, and the inverter exhibits better V
in–V
out signal matching.
After a 42 day duration in an air environment at room temperature,
the V
out of the inverter was reduced by
only 3.75% in the case of a high level of output voltage, and the
low level of output voltage is basically unchanged.
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