The superior water blocking ability of electron cyclotron resonance (ECR)-plasma 5i02 film has been investigated. We compared this film to normally used dielectric films in the field of multilevel interconnection technology, such as a Sill4plasma 5i02 film and a tetraethoxysilane (TEOS)-plasma 5i02 film by the pressure cooker test. The structural difference between these films was investigated by Fourier transform infrared spectroscopy and Raman spectroscopy. We found that the improved performance was due to structural differences and the content of hydrogen in the ECR-plasma 5i02 film.
Indium chloride (In-Cl) scintigraphy has been used to evaluate various hematological diseases for many years. However, there have been few reports on patients with bone marrow reconversion showing high uptake in In-Cl scintigraphy. Herein, we report a case of a 68-year-old man with esophageal cancer who underwent F-FDG PET/CT for staging of the disease.F-FDG PET/CT demonstrated high uptake in the first lumbar vertebral body, which was difficult to distinguish bone metastasis and bone marrow reconversion. In-Cl scintigraphy demonstrated specific findings with high uptake in the lesion, indicating bone marrow hyperplasia or reconversion.
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