Thiocolchicoside is a most common used muscle relaxant in the case of treating acute painful muscle spasms. It has a selective affinity for the inhibitory gamma-amino butyric acid and glycinergic receptors, although, the proper pathway of the muscle relaxation is unknown till the date. This drug should be strictly prohibited in the patients causing seizures. The recent studies done by the European medicines agency says that it causes aneuploidy which leads to use of the drug for limited time period which was earlier considered safe. Aneuploidy is a common chromosome disorder occurring in the humans, which leads to genetic cause of miscarriage, congenital birth defects and reduced fertility in men. During pregnancy, in breastfeeding and in children below 16 years, Thiocolchicoside is contraindicated.
A method of fabricating suspended LPCVD and PECVD silicon nitride structure is demonstrated for a wide range of MEMS (Micro-Electro-Mechanical Systems) applications. Low stress LPCVD and PECVD silicon nitride film of 1 μm thickness were selected for the structure separately. Optical Lithographic parameters, viz, photoresist (PR) thickness, PR variety and baking parameters were optimized to obtain the PR suitable for selective etching of silicon and silicon nitride. Parameters of the dry etching process were also optimized to achieve anisotropic etching of silicon nitride and isotropic etching of Si to release the silicon nitride beam. The silicon nitride structures, thus released, were characterized using Scanning Electron Microscope (SEM) and Laser Doppler Vibrometer (LDV). Finite Element Method (FEM) analysis was carried out using COMSOL, to compare with the experimental modes of vibration investigated using the Laser Doppler Vibrometer (LDV). Thus we demonstrate that the first mode at 30 kHz was indeed the optimum match.
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