Antiferroelectric films of Sn doped Lead LanthanumZirconate-Titanate [(Pb, La)(Sn, Zr, Ti)O 3 , Sn-PLZT] with nano-grains were fabricated by aerosol-deposition (AD). The AD process produced highly dense films without visible pores. The polarization-electric field hysteresis loop and the phase transition behavior of PLZT with Sn doping into the B-sites were characterized. The grain sizes of the AD Sn-PLZT films, which were on the nano-scale, were controlled by the annealing temperature. Regardless of the compositions, the films with the nano-grains by the AD process showed less hysteretic behavior and larger stored energy. The Pb 0.97 La 0.02 (Zr 0.85 Sn 0.13 Ti 0.02 )O 3 (PL-0.13) film deposited by AD and annealed at 750 o C for 1 h showed an energy storage capacity and efficiency of 13.0 J/cm 3 and 78.9 %, respectively.
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