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Molecular dynamics investigation of interfacial mixing behavior in transition metals (Fe, Co, Ni)-Al multilayer system J. Appl. Phys. 105, 034902 (2009); 10.1063/1.3073899The rotation of ripple pattern and the shape of the collision cascade in ion sputtered thin metal films J. Appl. Phys.Surface structure evolution during atomic deposition in a Co-Al system was investigated using coaxial impact collision ion scattering spectroscopy ͑CAICISS͒. Half monolayer of Al and Co atoms were deposited on Co͑0001͒ and Al͑001͒ single crystal surfaces, respectively, in an ultrahigh-vacuum environment. CAICISS analysis of the deposited surface revealed an asymmetric interfacial reaction, as predicted by previous molecular dynamics simulations. Al atoms deposited on a Co substrate are placed on the surface with no interatomic intermixing. In contrast, significant surface intermixing with the deposited Co atoms occurs on the Al͑001͒ substrate, resulting in the formation of a CoAl intermetallic surface layer of B2 structure. These asymmetric features would be important to the understanding of the structural evolution of thin film multilayers.