Precision collimators and collimator arrays are increasingly critical components as telecommunication networks increase in bandwidth. In this paper we describe the collimator fabrication process at Corning Rochester Photonics Corporation. We describe replicated and etched collimator arrays and illustrate packaging concepts. Metrology and optical performance data is presented for both individual and arrayed collimators. Microlens surfaces etched into fused silica with surfaces sags of greater than 70 tim, surface finishes better than 30 A rms are presented. Collimator arrays with pointing errors less than 40 iRad, and microlens focal length uniformity error less than +1-0.5% have been fabricated and the data presented.

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