Abstrak – Kajian terhadap difraksi sinar-X struktur nano ZnO dengan waktu sonikasi yang berbeda telah dilakukan menggunakan metode hidrotermal-sonokimia. Variasi waktu sonikasi yang digunakan dalam kajian ini adalah 0 (tanpa sonikasi), 30, 45, dan 60 menit. Pola difraksi sinar-X diplotkan dan dibandingkan untuk mengetahui struktur, kristalinitas dan kemurnian ZnO yang dihasilkan. Estimasi ukuran kristal ZnO juga dihitung menggunakan persamaan Scherrer. Hasil penelitian menunjukkan bahwa struktur nano ZnO yang disintesis tanpa proses sonikasi memiliki kemurnian kristal yang rendah dengan ukuran kristal yang sedang berkisar dari 22,36 – 32,90 nm. Proses sonikasi telah menyebabkan kristalinitas dan kemurnian ZnO meningkat jadi lebih baik. Namun, memperpanjang waktu sonikasi hingga 45 sampai 60 menit menyebabkan membesarnya ukuran kristal ZnO. Waktu sonikasi yang paling optimal adalah 30 menit dimana mampu menghasilkan ZnO dengan kristalinitas dan kemurnian yang baik dan rentang ukuran kristal ZnO yang lebih kecil antara 22,09 – 21,97 nm. Kata kunci: difraksi sinar-X, struktur nano, ZnO, sonikasi, Scherrer Abstract – Research on the X-ray diffraction study of ZnO nanotructure synthesized at different sonication times has been done using hydrothermal-sonochemical method. Sonication variation times that were used in this study were 0 (without sonication), 30, 45, and 60 minutes. The X-ray diffraction patterns were plotted and compared to understand the structure, crystallinity and purity of the resulted ZnO. The estimated crystallite size of ZnO nanostructure were also calculated using Scherrer equation. The results showed that the ZnO nanostructure synthesized without sonication process has a low crystal purity and a fair crystallite size in the range of 22.36 - 32.90 nm. Sonication process has led to a better crystallinity and purity of ZnO. However, longer sonication times up to 45 to 60 minutes has caused to the larger crystal size of ZnO. The most optimum sonication time was found to be 30 minutes which resulted in a good crstallinity and purity of ZnO and smaller crystallite size in the range of 22.09 – 31.97 nm.Key words: X-ray diffraction, nanostructures, ZnO, sonication, Scherrer
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