Micro systems technology is one of the key enabling technologies of the 21st century [Hes03], with increasing relevance due to a general trend towards miniaturisation in many industries. The main boosters for this trend are currently the consumer and communication electronics market and-to a lesser extent-medical technology (especially microfluidic devices, which had a market volume of approx. $2.5B in 2017 [Cle17]). As an example, for the companies organized in the industry association

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