BiFeO 3 (BFO) thin films have been prepared on SrTiO 3 (001) single crystal substrates by sputtering process which is suitable for mass production. Domain structure can be controlled by off-cut angle and direction of SrTiO 3 substrates. A lateral PFM and a XRD reciprocal space mapping results reveal the BFO thin film on SrTiO 3 (001) with 4 o off-cut along [110] is single domain. The single domain BFO shows well-saturated ferroelectric D-E hysteresis loops at R.T.
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