The effects of Ti and Si addition on the phase equilibrium and mechanical properties of the equiatomic CoCrFeMnNi high entropy alloy (Cantor alloy) were investigated. The phase equilibrium at 1000 °C was determined from the result of X-ray diffraction and electron probe micro-analysis. Ti addition stabilizes the $$\sigma$$ σ phase, A12 phase and C14-Laves phase, while Si addition stabilizes the A13 phase. The phase relationships were represented by projection onto (Co, Fe, Mn, Ni)–Cr–X(Ti or Si) isothermal ternary cross-section at 1000 °C in Co–Cr–Fe–Mn–Ni–X senary system. Tensile tests were conducted on Cantor-based fcc single solid solution alloys with Ti or Si dissolution at room temperature. The 0.2% yield strength and ultimate tensile strength increased with either element addition. The Ti-added alloy showed higher strength than the Si-added alloy. The difference in ductility in the alloys is related to their strain hardening behavior in the higher strain range. Graphic abstract
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