As a part of a SEMATECH project to improve the cost performance of semiconductor facility fluid systems, cost models have been developed in Microsoft Excel for gases chemicals, and ultra pure water (UPW) systems. These cost models are designed to permit cost analysis associated with the acquisition, use, and maintenance of fluid systems as well as cost comparisons of various fluid supply and distribution methods using a consistent costing methodology. The system attributes to be input in the model include the flowrate, and maintenanceheliability data. The subsystem attributes to be input in the model include the capital costs, leased equipment costs, utility usage, labor requirements, and other operating costs. Based on these inputs, the total capital and operating costs are calculated for a fluid system and ten year cost analysis is performed. The output is reported in terms of cost per unit volume.