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Novel bulk acoustic-wave high-Q resonators and acoustically coupled resonator filters have been fabricated and operated at their fundamental half-wavelength mode in the 200-500-MHz frequency range. These structures are fabricated on thin ZnO/silicon diaphragms with dimensions small enough to be incorporated within integrated circuits. Resonator Q’s near 2600 at the fundamental mode have been obtained and strong inter-resonator acoustic coupling has been achieved yielding filters having insertion loss (untuned) as low as 5.5 dB.

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