Nanometer size polarized domains were written in a PbZr1−xTixO3 (PZT) thin film using an atomic force microscope (AFM) and the relationship between the polarized domain and the grain of the film was investigated. The polarized domain was formed by applying a pulse voltage to the ferroelectric PZT thin film through a conductive AFM tip. The polarized domain structure was observed by imaging the piezoelectric-induced surface vibration by an AFM with an ac voltage applied between the tip and the bottom electrode of a sample. The polarized domains with a diameter of 50 nm were written within a single grain.

Employing the time-dependent approach, we investigate a quantum tunneling decay of manyparticle systems. We apply it to a one-dimensional three-body problem with a heavy core nucleus and two valence protons. We calculate the decay width for two-proton emission from the survival probability, which well obeys the exponential decay-law after a sufficient time. The effect of the correlation between the two emitted protons is also studied by observing the time evolution of the two-particle density distribution. It is shown that the pairing correlation significantly enhances the probability for the simultaneous diproton decay.

A super-precise method of evaluating the coefficient of thermal expansion (CTE) of ultra-low-expansion glasses for future extreme ultra-violet lithography (EUVL) systems was developed using the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Evaluation was demonstrated for two commercial glasses, TiO2-SiO2 glass (C-7971) and Li2O-Al2O3-SiO2 glass ceramic (Zerodur). For the C-7971 specimens, the sensitivity and resolution in the velocity measurement of leaky surface acoustic waves (LSAWs) for the CTE were estimated to be 4.40 (ppb/K)/(m/s) and ±0.77 ppb/K for ±2σ (σ: standard deviation). LSAW velocity differences caused by different TiO2 concentrations and distributions or striae in each specimen were successfully detected and evaluated. For the Zerodur specimens, LSAW velocity differences associated with the chemical compositions and crystallization conditions were observed among different ingots and specimens. This ultrasonic method is expected to be an extremely useful and effective CTE evaluation technology and to contribute to improving and developing EUVL-grade glass materials.

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A 10-nm-thick PbZr0.25Ti0.75O3 thin film is epitaxially grown on a SrRuO3/BaTiO3/ZrO2/Si heterostructure substrate by reactive evaporation. Structural and electrical properties of the film are investigated. It is concluded that the film is ferroelectric and retains a native uniform upward polarization. Artificial downward polarization domains, whose average diameter is 24 nm, can be formed in the film.