We demonstrate the high-speed epitaxial growth of a Eu 3+ -doped Y 2 O 3 (Eu 3+ :Y 2 O 3 ) thick film phosphor grown on a (100) yttria-stabilized zirconia substrate by laser-assisted metalorganic CVD. The deposition rate was 42 μm h −1 and the resultant 7-μm-thick Eu 3+ :Y 2 O 3 film was optically transparent. Under UV and X-ray irradiation, the Eu 3+ :Y 2 O 3 thick film emitted red light originating from the 5 D 0 → 7 F 2 transition of Eu 3+ ions with a fluorescence decay time of 1.7 ms.

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