One of the most important goals of flat panel display (FPD) manufacturing is to reduce the cost of excimer laser annealing (ELA) processes of low-temperature poly-Si (LTPS) technology.We developed novel XeF (351 nm) and KrF (248 nm) excimer lasers specially designed for ELA. The semiconductor-fieldproven excimer laser technologies are applied to stabilize the operation and to reduce the cost.
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