The anomalous increase and decrease in the S-parameters of Doppler broadening spectroscopy in positron annihilation spectroscopy in a narrow range of Sn atom content were detected in a Ge1−xSnx thin film grown by MBE at low temperatures. The increase can be explained in terms of vacancies when the target content of 1.7% Sn atoms is incorporated in a Ge matrix, owing to the binding nature between them. However, the S-parameters were markedly decreased when the target content of Sn atoms in the film grown at the same temperature was 0.1%. These changes in the S-parameters correspond to the carrier concentrations obtained by Hall measurements.

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