Articles you may be interested inDevelopment of an ion beam alignment system for real-time scanning tunneling microscope observation of dopant-ion irradiation Rev. Sci. Instrum. 79, 073707 (2008); 10.1063/1.2957608 Development of liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system Rev.A high-temperature scanning-tunneling-microscope ͑STM͒/low-energy ion-gun combined system has been developed in order to clarify the microscopic aspects of annealing processes of ion-irradiated Si surfaces. This system enables us to perform atom-resolved high-temperature STM observation and ion beam irradiation simultaneously in ultrahigh vacuum conditions. Taking great advantage of this system, we have successfully obtained sequential STM images of high-temperature Si͑111͒ surfaces irradiated with 3 keV Ar ϩ single ions. The STM results have shown that the surface defects induced by single ion irradiation show various changes in size and shape, which is considered to result from diffusion of vacancies and interstitial atoms in the substrates, diffusion of atoms on the surface, and from an anisotropic character of the surface atomic arrangement.

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