The pure and tungsten doped titanium oxide WxTi1-xO2 (x=0, 0.1) thin films have been successfully deposited on the glass substrate at 400 °C using spray pyrolysis technique. The structural properties of the prepared films were characterized by X-Ray Diffraction (XRD). From the XRD spectrum, the sample shows the amorphous structure. Their surface morphology was probed using Scanning Electron Microscopy (SEM) and the mechanical properties, topography and surface roughness of the grown films was investigated by Atomic Force Microscopy (AFM). The functional group and optical characteristic of prepared films were analyzed by Fourier Transform Infra-Red (FT-IR) spectroscopy and UV-Vis-double beam spectrometer.  The optical energy gap was determined by transmittance measurement.