Frequency dependence of electron temperature in hollow cathode-type discharge as measured by several different floating probe methods To cite this article: Shuichi SATO et al 2018 Plasma Sci. Technol. 20 085405 View the article online for updates and enhancements. Related content Floating harmonic probe measurements in the low-temperature plasma jet deposition system M Zanáška, Z Hubika, M ada et al.-Improved RF-driven probe method for RF discharge plasma diagnostics A Ohsawa, M Ohuchi and T Kubota-Effect of finite electrode area ratio on highfrequency Langmuir probe measurements M Shimoyama, K-I Oyama, T Abe et al.