The sensitivity of a piezoresistive sensor holds great importance in case of bio-medical applications. In this paper, we will discuss about how to enhance the sensitivity of a cantilever based piezoresistive sensor. The methodology behind this enhancement is creating S tress Concentration Region (S CR) on the beam. These S CR's are created by introducing defects on the beam. As the S tress Concentrated Region elements increases the stresses, the deformation will increase which will lead to the enhancement of the sensitivity of piezoresistive sensor. With introduction of a Optimal defect (S tar design) and in comparison with the previous defects, this paper will lead to a enhanced sensitive piezoresistive sensor.
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