We propose and demonstrate a novel technique for simultaneous measurement of the phase index, n(p) , the group index, n(g) , and the thickness, t , of transparent plates by use of a low-coherence interferometer. The output light from a superluminescent diode is focused upon the front plane of a transparent plate that is used as the sample. The sample stage is subsequently moved until the light is focused upon the rear plane of the plate. Measurement of the stage movement distance and the corresponding optical path difference allows us to determine both n(p) and n(g) . By placing the sample between two glass plates, we measured n(p) , n(g) , and t simultaneously, with an error of 0.3% or less, for nearly 1-mm-thick transparent plates, including glass and electro-optic crystals.
We have developed a low-coherence interferometer system used for the simultaneous measurement of refractive index n and thickness t of transparent plates. Both the phase index n(p) and group index n(g) can be determined automatically in a wide thickness range of from 10 microm to a few millimeters. Two unique techniques are presented to measure n(p), n(g), and t simultaneously. One allows us to determine n(p), n(g), and t accurately by using a special sample holder, in which the measurement accuracy is 0.3% for the thickness t above 0.1 mm. In the other technique the chromatic dispersion delta n of index is approximately expressed as a function of (n(p) - 1) on the basis of measured values of n(p) and n(g) for a variety of materials, and then the simultaneous measurement is performed with a normal sample holder. In addition, a measurement accuracy of less than 1% is achieved even when the sample is as thin as 20 microm. The measurement time is also 3 min or more.
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