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Hexagonal ErFeO 3 (h-ErFeO 3 ) thin films were fabricated by a pulsed laser deposition method. X-ray diffraction experiments confirmed that singlephase h-ErFeO 3 thin films were successfully obtained and were c axis-oriented. Ferroelectricity was confirmed by D-E hysteresis loop measurement at room temperature and the magnitude of spontaneous polarization was estimated to be 200 nC/cm 2 . A weak ferromagnetism appeared below 120 K and dielectric constants started to exhibit magnetic field dependence. These observations demonstrate the coexistence of ferroelectricity and weak ferromagnetism in h-ErFeO 3 thin films.

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