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Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations, are discussed. For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising.

In this paper the influence of RF power, ammonia flow, annealing temperature, and annealing time on the optical and mechanical properties of plasma-enhanced chemically vapor deposited silicon oxynitride films, is presented. A low refractive index (1.47 to 1.48) film having tensile stress has been developed as cladding material for optical waveguides. By combining this waveguide material with a special type of UV photosensitive glass, a low tensile stress strip-loaded waveguide structure. based on a three-laver sandwich structure, has been designed and the stress distribution through the srructure investigated.

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Phone : +45 4593 4619, Fax : +45 4588 7762 lriUMMARY In this paper we will present an opto-mechanical sensor based on a Bragg grating as strain sensing element. The motivation for choosing this alternative way of strain sensing, is that the sensed information is directly encoded into a wavelength which is an absolute parameter insensitive to typical intensity and phase noise. As a demonstration of this "new" detection principle we have chosen to fabricate an accelerometer. Calculations of the sensitivity which indicate a dynamic strain resolution down to 0.6 x lO-'/dI-€z at frequencies above 100% will be presented. The fabrication of the accelerometer employing (110) silicon is also discussed.