No abstract

This paper concerns a micro-scale gyroscope based on a 1 mm diameter diamond hemispherical resonator with embedded polysilicon electrodes. Frequency mismatch and quality factor of the wineglass vibration modes are studied. The device has embedded electrodes used for electrostatic transduction of resonator vibration and for electrostatic mode-matching. The air gap between the resonator and electrodes is small to increase the frequency tuning range for a given supply voltage. The 2θ-mode resonant frequency mismatch can be minimized from 2.4% to 0.1% by applying a low 2.5V tuning voltage.