We present in this paper an interesting idea to fabricate 3D high aspect ratio micro structures. Pillars with different heights can be generated with one step UV lithography. Various 3D micro structures have been successfully fabricated. A Taiwan 3D terrain map is selected to demonstrate the ability of the proposed method. We will introduce the idea of this approach, fabrication details and plenty of successful experimental results in this paper.

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This paper presents an x-ray machining system for the fabrication of three-dimensional microstructures with free-form surfaces. The structures with different sizes and various shapes can be generated by a single mask combining with precise moving paths. By adjusting the motions such as path types, overlaps and velocities, various 3D microstructures with complex features can be fabricated. The idea and the construction of this system, fabrication details and successful preliminary experimental results are introduced in this paper.

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