No abstract

Actuators based on the electrostatic principle are one of the most important in microsystem technology. In t h e future, actuators of 10 or 20 type will be necessary in many fields, especially in optical deflection and scanning systems. They will solve many different problems: device fabrication processes, surfacedeformation, reflection factors. optimization of movement, electrical drive and reliability. Micromechanic electrostatic torsional mirrors are described showing swivel angles up to 30'.

No abstract