Articles you may be interested inSelective etching and polymer deposition on InP surface in reactive ion etching with a mixture of methane and hydrogen J.Photoluminescence characterization of InP surface reactive ion etched by a gas mixture of ethane and hydrogen

Articles you may be interested inSelective etching and polymer deposition on InP surface in reactive ion etching with a mixture of methane and hydrogen J.

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The advances towards high-quality dry etching techniques for InP-based materials are reviewed, including recent results on process induced damage. Methods of in situ etch depth control are discussed, and examples of devices advantageously fabricated by dry etching techniques are presented