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We studied the structural properties of (Ge+SiO2)/SiO2 multilayer films, especially the influence of the deposition temperature and the parameters of subsequent annealing on the formation and spatial correlation of Ge quantum dots in an amorphous silica matrix. We showed that in-layer and inter-layer spatial correlations of the formed Ge quantum dots strongly depend on the deposition temperature. For suitable chosen deposition parameters, highly correlated dot positions in all three dimensions can be obtained. It is demonstrated that the degree of the spatial correlation of quantum dots influences the size distribution width, which further affects the macroscopic properties of the quantum dot arrays.

Reevaluation and recalculation of thermally stimulated current (TSC) data from semi-insulating (SI) GaAs, published by many different authors over a period of three decades were done by means of the new analytical method, simultaneous multiple peak analysis (SIMPA). The SIMPA procedure clearly resolved contributions from various overlapping TSC peaks and enabled the precise determination of signatures (activation energy, Ea and capture cross section, σ) of all observed deep traps. The analyzed TSC spectra refer to SI GaAs samples that have been grown/treated in quite different ways (various growth techniques, growth under As or Ga rich conditions, different annealing procedures, irradiation with neutrons, γ rays, etc.). Although the SIMPA procedure was applied to apparently quite different TSC spectra, in all cases excellent fits were achieved, with the unique set (or subset from it) of eleven different deep traps, the only difference being in relative and absolute concentrations of traps. Despite a broad variety of samples analyzed in this article, the set of deep traps obtained is the same as the one being previously seen in the narrow range of SI GaAs samples. This finding suggests that this set of traps is a finite and complete set of all defects with deep levels in SI GaAs. It was also concluded that these defects are primarily complexes containing simple native defects.