Long coherence times of single spins in silicon quantum dots make these systems highly attractive for quantum computation, but how to scale up spin qubit systems remains an open question. As a first step to address this issue, we demonstrate the strong coupling of a single electron spin and a single microwave photon. The electron spin is trapped in a silicon double quantum dot, and the microwave photon is stored in an on-chip high-impedance superconducting resonator. The electric field component of the cavity photon couples directly to the charge dipole of the electron in the double dot, and indirectly to the electron spin, through a strong local magnetic field gradient from a nearby micromagnet. Our results provide a route to realizing large networks of quantum dot-based spin qubit registers.

Electron spins hold great promise for quantum computation because of their long coherence times. Long-distance coherent coupling of spins is a crucial step towards quantum information processing with spin qubits. One approach to realizing interactions between distant spin qubits is to use photons as carriers of quantum information. Here we demonstrate strong coupling between single microwave photons in a niobium titanium nitride high-impedance resonator and a three-electron spin qubit (also known as a resonant exchange qubit) in a gallium arsenide device consisting of three quantum dots. We observe the vacuum Rabi mode splitting of the resonance of the resonator, which is a signature of strong coupling; specifically, we observe a coherent coupling strength of about 31 megahertz and a qubit decoherence rate of about 20 megahertz. We can tune the decoherence electrostatically to obtain a minimal decoherence rate of around 10 megahertz for a coupling strength of around 23 megahertz. We directly measure the dependence of the qubit-photon coupling strength on the tunable electric dipole moment of the qubit using the 'AC Stark' effect. Our demonstration of strong qubit-photon coupling for a three-electron spin qubit is an important step towards coherent long-distance coupling of spin qubits.

Semiconductor qubits rely on the control of charge and spin degrees of freedom of electrons or holes confined in quantum dots. They constitute a promising approach to quantum information processing, complementary to superconducting qubits. Here, we demonstrate coherent coupling between a superconducting transmon qubit and a semiconductor double quantum dot (DQD) charge qubit mediated by virtual microwave photon excitations in a tunable high-impedance SQUID array resonator acting as a quantum bus. The transmon-charge qubit coherent coupling rate (~21 MHz) exceeds the linewidth of both the transmon (~0.8 MHz) and the DQD charge qubit (~2.7 MHz). By tuning the qubits into resonance for a controlled amount of time, we observe coherent oscillations between the constituents of this hybrid quantum system. These results enable a new class of experiments exploring the use of two-qubit interactions mediated by microwave photons to create entangled states between semiconductor and superconducting qubits.

Hybrid architectures integrating mesoscopic electronic conductors with resonant microwave cavities have a great potential for investigating unexplored regimes of electron-photon coupling. In this context, producing nonclassical squeezed light is a key step towards quantum communication with scalable solid-state devices. Here we show that parametric driving of the electronic conductor induces a squeezed steady state in the cavity. We find that squeezing properties of the cavity are essentially determined by the electronic noise correlators of the quantum conductor. In the case of a tunnel junction, we predict that squeezing is optimized by applying a time-periodic series of quantized δpeaks in the bias voltage. For an asymmetric quantum dot, we show that a sharp Leviton pulse is able to achieve perfect cavity squeezing.