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Structural changes in silica glass, produced by electron irradiation, with electrons energies of 50 keV and doses of 5–80 mC/cm2 were studied by Raman spectroscopy in frequency ranges of 300–550 and of 700–1500 cm–1. It is shown that for irradiation doses less than 5 mC/cm2 the decrease of siloxane rings concentration in glass takes place. The further increase of dose results in the increase of siloxane rings concentration in glass network after irrsdiation. And for doses of more than 40 mC/cm2 the whole destruction of glass structure and its structural units takes place. The obtained results for silica glass were compared with similar results for crystalline quartz.

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