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An investigation of the Co oxides formation and distribution dependent on preparation conditions during electrodeposition of hcp Co-based films with perpendicular magnetic anisotropy has been made.It has been shown that the.[ 1001 oriented columnar crystallites promote some regularity in impurity distribution and orientation in the film plane, whereas the [OOl] oriented onesnon-regular distribution. Such a behaviour is associated with the difference in the impurity incorporation for these two cases: preferably crystalline and intergranular, respectively, and atomic bonds saturation, and influence on the mechanical and magnetic properties of the investigated films.

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