Abstract. (70-x)SiO 2 -30HfO 2 -хP 2 O 5 (х= 5, 10 mol %) glass planar waveguides activated by 0.5 mol% Er 3+ ions were prepared by sol-gel route. Several phosphorous precursors have been investigated for the synthesis of a dielectric stable sol useful for the realization of planar waveguides. The waveguides were investigated by different diagnostic techniques. The optical properties such as refractive index, thickness, number of propagating modes and attenuation coefficient were measured at 632.8 and 543.5 nm by prism coupling technique. Transmission measurements were carried out in order to assess the transparency of the deposited films. Photoluminescence measurements and lifetime decay curves of the Er 3+ transition ( 4 I 13/2 → 4 I 15/2 ) were performed in order to investigate the role of P 2 O 5 .
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