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-The paper presents new results on investigation of structure and physical-mechanical properties of near surface layers of titanium alloys after (W + , Mo + ) ion implantation and subsequent thermal annealing under 550 °C during 2 h. Using back scattering (RBS) of helium ions and protons, scanning electron microscopy (SEM) with microanalysis (EDS), (WDS), proton (ion) induced X-ray emission (PIXE), X-ray phase analysis (ERD) with a sliding beam geometry (0.5 °C), Mössbauer spectroscopy (MS), measurements of nanohardness and elastic modulus, friction wear (cylinder-plate), measurements of corrosion resistance in a salt solution, we investigates VT-6 and VT-22 samples, and determined their fatigue resistance under cyclic loads. Two times increase of the hardness, decrease of wear and increased fatigue resistance was found, which was related to the formation of small dispersion (nanodimension) nitride, carbonitride, and intermetalloid phases.

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