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No abstract

In this work, we designed, fabricafed and tested a low cost, disposable, flow-fhrough sensor fo determine the amounf of free chlorine in wafer. The whole sensor cell combining electrodes and a fluidic channel is micromachined on a chemically-inert fransparenf cyclic olefin copolymer substrate. The advantages are (a) disposability from low cost (6) wide operafion range from three-elecfrode design (c) easy electrical andfluidic inferconnecfionfrom a chip format, compared fo previous. works The sensor showed a good response and linearity in the chlorine concenfrafion ;ranging from 1.5 fo 8 ppm, which applies fo common chlorinaiion process