The nanocomposite of PDMS using functionalized fumed silica and nonreactive POSS as fillers were prepared by blend method in a planetary mixer. Fumed silica was functionalized by aliphatic and aromatic groups to study the filler–filler interactions with the aliphatic and aromatic POSS fillers and consequently their influence on the properties in the PDMS matrix. Transmission electron microscope (TEM) showed a good dispersion in the systems having the silica and POSS fillers with similar modifications. However, aliphatic and aromatic filler combinations showed more aggregated structures. Moreover, aliphatic POSS despite of good dispersion at higher loadings, act as lubricant, which is attributed to the disturbance in the PDMS‐ silica filler interaction and also the filler–filler interaction within fumed silica. There is a decrease in complex viscosity with the functionalization of fumed silica and with the aromatic/aliphatic POSS fillers. The thermal stability of aromatic functionalized fillers improves owing to the thermally stable phenyl groups. © 2013 Wiley Periodicals, Inc. J. Appl. Polym. Sci., 2013