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In this work, the analysis of the plasma modification of polydimethylsiloxane (PDMS) substrates was conducted. The influence of the modification onto the changes occurred within the geometrical structure and chemical composition of the surface was analyzed. Due to the study of the atomic force microscopy, it was possible to determine the relationships between the surface development and applied process parameters, defining the conditions facilitating to obtain isotropic or anisotropic orientations of wrinkles. A precise analysis of the chemical composition of the surface, executed before and after the modification processes, enabled to define the changes in their elementary composition. Moreover, the modification influence onto the changes of the contact angle and the surface free energy were also analyzed. So, based on the research it was stated that the increase of value of the surface free energy is proportional to the sp 3 phase contents in the DLC coatings.