No abstract

No abstract

No abstract

Mechanical ruling is the main processing method for gratings with a large blaze angle and high diffraction order， such as echelle. The large blaze angle of echelle makes its ruling process difficult. When the angle between the ruling tool edge direction and the ruling direction exceeds the error or when the rul• ing tool is designed without force balance， the tool undergoes a large horizontal torque during the ruling process， which can easily lead to tool chatter， affecting the quality of the gratings. To suppress the tool chatter and improve the stability of the grating ruling process， the chatter suppression performance of the grating ruling tool elastic support mechanism is evaluated in this study， and an innovative double-layer par• allel hinge tool carrier is proposed. The structural stiffness and modal characteristics of the new and old tool carriers are compared and analyzed through finite-element simulation. The chatter state of the two 文章编号 1004-924X (2023)13-1941-09 收稿日期： 2022-12-06； 修订日期： 2023-02-07. 基金项目： 国家自然科学基金资助项目 (No. 62075216) ； 中国科学院战略性先导科技专项 (C 类) 资助 (No. XDC04000000) 第 31 卷 光学 精密工程 tool holders is measured using an acceleration sensor， and the chatter suppression effects of the two tool holders are compared. The results indicate that when the double-layer parallel spring tool carrier is subject• ed to the ruling torque， the deformation at the tool clamping position and the flexure hinge is reduced by 36% and 24%， respectively， compared with the previous structure， and the first-order mode is increased by a factor of 2. 8. The amplitude of the flutter signal on both sides of the baseline is reduced by 13. 6% and 22. 5%， respectively， in the time domain. The test results confirm that the proposed mechanism is ad• vantageous for echelle ruling. The proposed tool carrier optimization design method and flutter suppres• sion technology provide new theoretical guidance for grating ruling technology.

No abstract