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Mg-doped zinc titanate (ZnTiO3) films were prepared using RF magnetron sputtering. Subsequent annealing of the as-deposited films was performed at a temperature ranging from 600 to C for 2 hours with a heating rate of C/min in air. It was found that the as-deposited films were amorphous and contained 2.77 at.% magnesium. This was further confirmed by the onset of crystallization that took place at annealing temperatures of C. The results showed that single Zn2Ti3O8phase was existed at C. When annealing is at C, the results revealed that mainly a hexagonal ZnTiO3phase accompanying a Zn2Ti3O8minor phase was observed. When annealing is at C, the results showed that single hexagonal ZnTiO3phase is stable at C. It means that ZnTiO3phase containing no Mg is unstable at C and is decomposed from hexagonal ZnTiO3to cubic Zn2TiO4and rutile TiO2at C. In addition, the effect of oxygen partial pressure for the films deposited on the phase transformations and microstructures of zinc titanites thin film was investigated.