A small device for the rapid ultrahigh temperature sterilization of surfaces is described. Microwave power generated by a 2.45 GHz magnetron is delivered via coaxial cable to a silicon carbide block housed within the chamber. Small quantities of water or aqueous hydrogen peroxide are introduced into the chamber. Upon application of power, the liquid flashes to vapor and superheats producing temperatures to 300 °C. The hot vapor permeates the enclosed space and contacts all exposed surfaces. Complete microbial kill of >10 6 colony forming units of the spore forming thermophile, Bacillus stearothermophilus, has been demonstrated using a variety of temperatures and exposure times in both steady state and thermal pulse modes of operation.

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