We fabricated self-organized Au-Ag alloy nanodots on a thin Ti seed layer coated MgO(001) substrate by using Au/Ag bilayer dewetting phenomenon. For comparison, Au/Ti and Ag/Ti films were also fabricated and thermal agglomerated on the MgO substrate. The samples were deposited by DC magnetoron sputtering and were post-anneal at 350 °C-450 °C for 5 h. Nanodot formations of Au, Ag, and Au/Ag on the Ti seed layer coated MgO substrate after annealing were observed by atomic force microscopy measurements. X-ray photoelectron spectroscopy results revealed that the composition ratio of nanodots fabricated by dewetting of the Au/Ag bilayer film was almost Au 50 Ag 50 . X-ray diffraction analyses showed that the Au/Ag films grown on the Ti seed layer coated MgO(001) substrate yielded fcc-AuAg(001)-oriented epitaxial nanorods after annealing. Consequently, we successfully fabricated self-organized fcc-AuAg(001) alloy nanodots on the MgO substrate with the Ti seed layer.