Low dimensional (nanowall) ZnO structures were prepared by a two-step growth method with oxygen-plasma-assisted molecular beam epitaxy, where the as-grown film was first engraved on a porous template using the oxygen plasma and then the ZnO nanowalls were grown on the template. The resonance Raman spectra showed the surface mode. A morphology model was proposed on the basis of the scanning electron microscopy patterns and this mode. The room and low temperature photoluminescence showed that the nanowalls had intense ultraviolet emission properties, which benefited from the low dimensional structure with few defects.

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