No abstract

In this paper, a novel surface-enhanced Raman scattering (SERS) substrate based on Integrated Circuit (IC) process was designed, using photolithography, etching and other processes on the silicon wafer processing. Its surface morphology and Raman activity were characterized and tested. The relationship between the substrate’s photolithographic pattern and its Raman activity, stability and reproducibility has been analyzed and verified, and some suggestions for improvement of processing steps were given. This substrate can be used for the detection of biological proteins and provides a powerful research tool for life science and analytical chemistry research.