No abstract

An extensive two-and three-dimensional analysis of air flow in a POLARIS® 2200 Microlithography Cluster spin coater was conducted using FLuENTTM Computational Fluid Dynamics (CFD) software. To supplement this analysis, direct measurement of air flow velocity was also performed using a Dantec® Hot Wire Anemometer. Velocity measurements were made along two major planes across the entire flow field in the spin coater at various operating conditions. it was found that the flow velocity at the spin coater inlet is much lower than previously assumed and quite nonuniform. Based on this observation, a pressure boundary condition rather than a velocity boundary condition was used for subsequent CFD analysis. A comparison between calculated results and experimental data shows that the 3D model accurately predicts the air flow field in the spin coaler. An added advantage of this approach is that the CFD model can be easily generated from the mechanical design database and used to analyze the effect of design changes. The modeled and measured results show that the flow pattern in the spin bowl is affected by interactions between the spinning wafer, exhaust flow, and the gap between the spin head and surrounding baffle. Different operating conditions such as spin speed, inlet pressure, and exhaust pressure were found to generate substantially different flow patterns. It was also found that backflow of air could be generated under certain conditions.