The distribution profile of residual stress on the surface layer of shot-peened materials is often in a hook shape. We analysed the distribution characteristics of residual stress by detecting dislocation configurations. The position of maximum compressive residual stress (MCRS) shifts inward with an increase in shot peening strength. It was found that long-term orderly dislocation pile-up groups frequently appeared in the MCRS region. The location of MCRS is not necessarily related to maximum dislocation density. At low strength, both the maximum dislocation density and the MCRS are on the surface region. At high strength, the surface region structures are composed of sub-grains and dislocation cells. The position of maximum dislocation density is between the surface region and the MCRS.